Beilstein J. Nanotechnol.2018,9, 1895–1905, doi:10.3762/bjnano.9.181
acetylacetonate; carbon nanowalls; growthzones; ICP PECVD; metal-organic precursor; Introduction
The first report of the synthesis of carbon nanowalls (CNWs), i.e., wall-like carbon nanosheets aligned perpendicular to the substrate, was given by Wu and co-workers [1]. The average thickness of these sheets was
specific structures can be controlled through the bias voltage and substrate temperature, both parameters that influence the particle energy of the growth precursors. The dependence is indicated schematically in Figure 5. By increasing bias voltage and substrate temperature the growthzones are changed
from nanorods at low energies, to thorny structures and straight CNWs at medium energies and curled CNWs at high energies.
The influence of four different substrate materials on the CNW structure was also investigated. The growthzones for these substrates are shown schematically in Figure 6. It was
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Figure 1:
Three-stage model of CNW growth (adapted from Kondo and co-workers) [18].